Microporous silicon dioxide/vycor membranes for gas separation

Author

Justin R. Barone, New Jersey Institute of Technology

Document Type

Thesis

Date of Award

Fall 1-31-1997

Degree Name

Master of Science in Engineering Science- (M.S.)

Department

Committee for the Interdisciplinary Program in Materials Science and Engineering

First Advisor

Roland A. Levy

Second Advisor

Lev N. Krasnoperov

Third Advisor

James M. Grow

Abstract

This study focused on producing membranes for molecular sieving of gases by reducing the pore size of an already existing membrane structure. To do this, SiO₂ was deposited inside the pores of a Vycor tube with initial pore diameter of 4 nm. The film deposition took place by a low pressure chemical vapor deposition (LPCVD) process where diethylsilane (DES) and nitrous oxide (N₂O) were used as precursor gases. A counterflow reactant geometry was used where the precursor gases were flowed on both sides of the porous membrane. This deposition geometry gave higher selectivities and better mechanical stability. The flows of H₂, He, N₂, Ar, toluene, and dichloromethane (DCM) were monitored in-situ after each deposition. Selectivities on the order of 1000:1 were observed for H₂ and He over N₂. It was also shown that N₂/toluene selectivities of 40:1 were also possible.

Recommended Citation

Barone, Justin R., "Microporous silicon dioxide/vycor membranes for gas separation" (1997). Theses. 995.
https://digitalcommons.njit.edu/theses/995