Document Type
Thesis
Date of Award
Fall 1-31-2004
Degree Name
Master of Science in Materials Science and Engineering - (M.S.)
Department
Committee for the Interdisciplinary Program in Materials Science and Engineering
First Advisor
Marek Sosnowski
Second Advisor
Haim Grebel
Third Advisor
Zafar Iqbal
Abstract
Poly-peri-naphthalene (PPN) is a one-dimensional (1 -D) graphite polymer with unique planar ladder-like conjugated molecular structure. PPN was predicted to be a good intrinsic conductor and have high thermal stability and high environmental stability.
In this project, chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD) of carbon films with PPN structure using PTCDA as precursor were carried out under different conditions. There is only limited information in literature on the synthesis of PPN films by PECVD process, which may allow deposition at a higher rate with lower substrate temperature. In this work the influence of deposition parameters, such as sublimation temperature, substrate (pyrolysis) temperature, pressure, plasma condition on the structure of deposition product was systematically studied. It's found that the following deposition parameters are required for carbon films containing PPN structure:
- CVD: sublimation temperature 510°C for PTCDA and substrate temperature around 380°C in atmosphere pressure. This confirms the results of previous studies of this material.
- PECVD: sublimation temperature and substrate temperature both approximate 350°C, with DC discharge power of several watts, stable plasma in argon gas of approximate 1 torr pressure.
In the synthesis of PPN films by both methods, substrate temperature plays an important role that affects quality of the films.
Recommended Citation
Yu, Chi, "Chemical vapor deposition of polymeric films" (2004). Theses. 537.
https://digitalcommons.njit.edu/theses/537
