Document Type
Thesis
Date of Award
8-31-1991
Degree Name
Master of Science in Electrical Engineering - (M.S.)
Department
Electrical and Computer Engineering
First Advisor
Ken K. Chin
Second Advisor
Roy H. Cornely
Third Advisor
Marek Sosnowski
Abstract
Electrical and optical properties of spin-coated THERMID polyimide EL-5010 have been studied and evaluated in this thesis. The D.C. bulk resistivities of 0.96-2.56 μm thick samples were measured to be 1016 Ω-cm over the 27-160°C range using a test system consisting of Keithley 236 Source-Measure Unit. The bulk resistivity decreased to 2 x 1014Ω-cm at 200?C. The surface resistivity, 1015Ω/0 , and breakdown voltage, 350 V/pm, were also measured. The fixed charge concentration and mobile ion concentration in the THERMID polyimide EL-5010 insulator of a MIS capacitor structure were measured using a high frequency C-V measurement technique. The measured value of the positive mobile ion concentration was 1.12 x 1011cm-2 and of the fixed charge was found to be negative with a value of 1011 cm-2. The transmission spectrum over the wave number range of 1-10 cm-1 was obtained using a test system consisting of a mercury lamp, a lamellar grating, and a dip-stick helium-cooled bolometer. The transmission spectrum for the wave number range of 10-60 cm-1 was obtained using a test system consisting of a Synchrotron far infrared light source, a Nicolet Michelson scanning spectrometer, and a pumped helium-cooled detector. In the wave number range of 1-25 cm-1, the far infrared absorption of the THERMID polyimide EL-5010 increased with the increasing of wave number and reached the maximum at wave number 25cm-1. In the wave number range of 25-60 cm-1, almost no transmission occurred. Mechanisms responsible for these electrical and optical properties are discussed.
Recommended Citation
Zhu, Zhixiong, "Measurement of the electrical and optical properties of Thermid polymide" (1991). Theses. 2694.
https://digitalcommons.njit.edu/theses/2694
