Document Type
Thesis
Date of Award
5-31-1993
Degree Name
Master of Science in Electrical Engineering - (M.S.)
Department
Electrical Engineering
First Advisor
MengChu Zhou
Second Advisor
Anthony D. Robbi
Third Advisor
David T. Wang
Abstract
This thesis addresses the issues in modeling and analysis of multichip module (MCM) manufacturing processes using Petri nets. Building such graphical and mathematical models is a crucial step to understand MCM technologies and to enhance their application scope.
In this thesis, the application of Petri nets is presented with top-down and bottom-up approaches. The theory of Petri nets is summarized with its basic notations and properties at first. After that, the capability of calculating and analyzing Petri nets with deterministic timing information is extended to meet the requirements of the MCM models. Then, using top-down refining and system decomposition, MCM models are built from an abstract point to concrete systems with timing information. In this process, reduction theory based on a multiple-input-single-output modules for deterministic Petri nets is applied to analyze the cycle time of Petri net models. Besides, this thesis is of significance in its use of the reduction theory which is derived for timed marked graphs - an important class of Petri nets.
Recommended Citation
Wang, Xinyao, "Modeling and analysis of semiconductor manufacturing processes using petri nets" (1993). Theses. 2200.
https://digitalcommons.njit.edu/theses/2200
