Document Type

Thesis

Date of Award

5-31-1993

Degree Name

Master of Science in Electrical Engineering - (M.S.)

Department

Electrical and Computer Engineering

First Advisor

Walter F. Kosonocky

Second Advisor

Constantine N. Manikopoulos

Third Advisor

Edwin Hou

Abstract

An infrared CCD camera system was designed and developed to operate a 320X244 Schottky-barrier IR-CCD Focal Plane Array (FPA) as an imaging radiometer. The goal of this research was to develop a reliable radiometer capable of resolving temperatures between 50 and 1000°C to within 1°C accuracy using non-contact spectral thermographic methods. To accomodate this wide dynamic range, the imager was operated in a non-interlaced format with variable optical integration times ranging from 120µsec to 122msec. Variable integration control was achieved by employing a "dump and read" timing procedure. To facilitate this operation, novel circuitry was developed for dynamically controlling the CCD waveforms to operate at the required integration time. Circuits were developed to embed critical information in the video signal to facilitate radiometric post-processing. An optoelectronically buffered digital interface was developed to connect the camera system to a Datacube processor. Additional circuitry enabled all frame rates to be displayed on an RS-170 monitor after processing. This system was designed to monitor the temperature of semiconductor wafers in Rapid Thermal Processing (RTP) reactors acting as the feedback control to the flash lamp heat sources.

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