Document Type
Thesis
Date of Award
Spring 1995
Degree Name
Master of Science in Electrical Engineering - (M.S.)
Department
Electrical and Computer Engineering
First Advisor
Robert Boris Marcus
Second Advisor
William N. Carr
Third Advisor
Durgamadhab Misra
Abstract
In this thesis, the design and fabrication of a silicon knife is described. The device design is based on the principle of oxidation sharpening.
The knife is made from a silicon wafer and can be made to be any chosen length up to 150 mm. It was made with the same basic procedures used in semiconductor chip manufacturing. This type of processing/manufacturing results in a knife with a high degree of sharpness and smoothness compared with existing knife technology.
The knife fabrication plan combines IC processing, techniques including anisotropic and isotropic etching of silicon, plasma dry etching and chemical etching dry oxidation, and KOH etching.
Recommended Citation
Wang, Mingli, "A silicon knife design and fabrication" (1995). Theses. 1562.
https://digitalcommons.njit.edu/theses/1562
