Introduction of embossed diaphragm in an integrated optical and electronic sensor
Document Type
Conference Proceeding
Publication Date
1-1-2010
Abstract
An embossed silicon diaphragm is introduced in the design and fabrication of an integrated two-sensor device. In this integrated approach, the optical pressure sensor is based on Fabry-Perot interferometry and the electronic pressure sensor is based on piezoresistivity. Deformation of the same diaphragm due to external applied pressure can be simultaneously detected optically and electronically. Analytical and experimental analyses are used to study the precision and accuracy of devices for sensing pressures in fluidic and gaseous media.
Identifier
78149337882 (Scopus)
ISBN
[9780470927168]
Publication Title
Ceramic Transactions
External Full Text Location
https://doi.org/10.1002/9780470930915.ch18
ISSN
10421122
First Page
195
Last Page
204
Volume
221
Recommended Citation
Padron, Ivan; Fiory, Anthony T.; and Ravindra, Nuggehalli M., "Introduction of embossed diaphragm in an integrated optical and electronic sensor" (2010). Faculty Publications. 6455.
https://digitalcommons.njit.edu/fac_pubs/6455
