Novel MEMS fabry-perot interferometric pressure sensors

Document Type

Conference Proceeding

Publication Date

1-1-2010

Abstract

A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors. © (2010) Trans Tech Publications.

Identifier

75849127314 (Scopus)

ISBN

[0878492941, 9780878492947]

Publication Title

Materials Science Forum

External Full Text Location

https://doi.org/10.4028/www.scientific.net/MSF.638-642.1009

e-ISSN

16629752

ISSN

02555476

First Page

1009

Last Page

1014

Volume

638-642

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