A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis

Document Type

Article

Publication Date

4-1-2010

Abstract

Because of wafer residency time constraints for cluster tools, it is very difficult to schedule them. This paper addresses their scheduling issues and conducts their schedulability and scheduling analysis. A Petri net (PN) model is developed to model them. With this model, to schedule a dual-arm cluster tool with wafer residency time constraints is to determine when and how long the robot should wait for. Based on the model, necessary and sufficient conditions under which the system is schedulable are presented. The conditions can be checked analytically. Meanwhile, an algorithm is developed for the optimal scheduling of dual-arm cluster tools. The algorithm finds an optimal periodic schedule with closed form expressions if it is schedulable. A method is also presented for the implementation of the obtained cyclic schedule by appropriately controlling the initial transient process. Examples are presented to show the application and power of the theory and algorithm. © 2006 IEEE.

Identifier

77950864273 (Scopus)

Publication Title

IEEE Transactions on Automation Science and Engineering

External Full Text Location

https://doi.org/10.1109/TASE.2008.2008633

ISSN

15455955

First Page

303

Last Page

315

Issue

2

Volume

7

Grant

60574066

Fund Ref

National Natural Science Foundation of China

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