Petri net-based scheduling of time-constrained dual-arm cluster tools with bounded activity time variation

Document Type

Conference Proceeding

Publication Date

11-17-2010

Abstract

For time-constrained cluster tool in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis. With Petri net (PN) model and a real-time control policy, this paper derives closed form schedulability conditions. If schedulable, an algorithm is developed to obtain an off-line periodic schedule. This schedule together with a real-time control policy forms a real-time schedule. It is optimal in terms of cycle time and can be analytically computed with closed form expressions. © 2010 IEEE.

Identifier

78149458426 (Scopus)

ISBN

[9781424454471]

Publication Title

2010 IEEE International Conference on Automation Science and Engineering Case 2010

External Full Text Location

https://doi.org/10.1109/COASE.2010.5584183

First Page

465

Last Page

470

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