Progress on Schottky-barrier image sensors

Document Type

Conference Proceeding

Publication Date

12-1-1989

Abstract

SBD (Schottky-barrier detector) image sensors are said to represent the most mature technology for large-area and high-density monolithic infrared FPAs (focal plane arrays) for many applications in the shortwave infrared (SWR), corresponding to the 1 to 3 μm range, and medium-wave infrared (MWIR), corresponding to the 3 to 5 μm range. PtSi SBDs represent the most established technology for SWIR and MWIR bands at an operating temperature of about 80 K. These SBDs can be designed for operation at 77 K with a dark current density in the range of 1.0 to 20 nA/cm2. Pd2Si SBDs were developed for operation in the SWIR band with passive cooling at 120 K. Infrared line sensing arrays with up to 4096 × 4 elements and area sensing arrays with up to 512 × 512 elements have been reported. The design of highly sensitive monolithic SBD FPAs involves trade-off between charge handling capacity and fill factor. These two parameters have been optimized in the design of high-density area-sensing arrays using vertically interlaced interline-transfer and charge-sweep device architectures.

Identifier

0024871243 (Scopus)

Publication Title

Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS

ISSN

10928081

First Page

6

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