Vanadium dioxide thin films for thermo-optical switching applications

Document Type

Conference Proceeding

Publication Date

1-1-2003

Abstract

Vanadium dioxide (VO2) thin films were fabricated by e-beam evaporation of vanadium thin films followed by thermal oxidation in oxygen ambient. The properties of the VO2 films were investigated for thermo-optical switching applications. Synthesized VO2 film displays a phase transition at 65-68°C. It exhibits an abrupt change in optical reflectivity over the phase transition temperature range. Results for VO 2 on a highly reflective metal layer are strongly dependent on the VO2 thickness. The optical switching has a major hysteresis of about 15°C between the heating and cooling branches. The evolution of the surface morphology with the oxidation time was studied with a SEM. The VO2 film was patterned on microplatforms by metal lift-off technique. We conclude that the evaporation followed by oxidation is an effective method to produce active VO2 film for thermo-optical switching devices.

Identifier

2942696433 (Scopus)

Publication Title

Materials Research Society Symposium Proceedings

External Full Text Location

https://doi.org/10.1557/proc-785-d10.4

ISSN

02729172

First Page

339

Last Page

344

Volume

785

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