Modeling and simulation of a surface micromachined triaxial accelerometer

Document Type

Conference Proceeding

Publication Date

12-1-2003

Abstract

In this paper, we present the modeling and simulation results of a monolithic triaxial accelerometer. The accelerometer is surface micromachined with fully differential capacitive readout. The mechanical and electrical behaviors of the accelerometer have been simulated and optimized by Finite Element Method (FEM). Static and modal simulations were done to study the static sensitivities and resonant frequencies using ANSYS. The sensing capacitances were analyzed with CoventorWare and compared with a parallel-plate model. The air damping effects are very different for both vertical and lateral moving structures. They were modeled with different analytical models and compared with the simulation results. The effect of the air damping on the dynamic response of the accelerometer is shown.

Identifier

6344228269 (Scopus)

ISBN

[0972842209]

Publication Title

2003 Nanotechnology Conference and Trade Show Nanotech 2003

First Page

344

Last Page

347

Volume

1

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