NEMS capacitive sensors for highly sensitive, label-free nucleic-acid analysis

Document Type

Conference Proceeding

Publication Date

12-1-2009

Abstract

A highly sensitive NEMS capacitive sensor with electrode separation in the order of Debye length is fabricated for label free DNA analysis. The use of nano-scale electrode separation provides better insight in to the target-probe interaction which was not previously attainable with macro or even micro scale devices. As the double layers from both the capacitive electrodes merge together and occupy a major fraction of the capacitive volume, the contribution from bulk sample resistance and noises due to electrode polarization effects are eliminated. The dielectric properties during hybridization reaction were measured using 10-mer nucleotide sequences. A 45-50% change in relative permittivity (capacitance) was observed due to DNA hybridization at 10Hz. Capacitive sensors with 30nm electrode separation were fabricated using standard silicon micro/nano technology and show promise for future electronic DNA arrays and high throughput screening of nucleic acid samples. © ICST Institute for Computer Sciences, Social Informatics and Telecommunications Engineering 2009.

Identifier

84885891024 (Scopus)

ISBN

[3642024262, 9783642024269]

Publication Title

Lecture Notes of the Institute for Computer Sciences Social Informatics and Telecommunications Engineering

External Full Text Location

https://doi.org/10.1007/978-3-642-02427-6_5

ISSN

18678211

First Page

19

Last Page

25

Volume

3 LNICST

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