Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy

Document Type

Conference Proceeding

Publication Date

12-1-2011

Abstract

There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance. © 2011 IEEE.

Identifier

82455167620 (Scopus)

ISBN

[9781612843865]

Publication Title

Proceedings IEEE International Conference on Robotics and Automation

External Full Text Location

https://doi.org/10.1109/ICRA.2011.5980119

ISSN

10504729

First Page

5499

Last Page

5504

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