Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry
Document Type
Conference Proceeding
Publication Date
5-25-2016
Abstract
Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.
Identifier
84978164157 (Scopus)
ISBN
[9781467399753]
Publication Title
Icnsc 2016 13th IEEE International Conference on Networking Sensing and Control
External Full Text Location
https://doi.org/10.1109/ICNSC.2016.7479012
Recommended Citation
Yang, Fajun; Wu, Naiqi; Qiao, Yan; and Zhou, Mengchu, "Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry" (2016). Faculty Publications. 10501.
https://digitalcommons.njit.edu/fac_pubs/10501
