Optimal scheduling analysis of treelike hybrid multi-cluster tools
Document Type
Conference Proceeding
Publication Date
11-14-2016
Abstract
A hybrid multi-cluster tool is composed of both dual and single-arm robotic tools. Since their behavior is different, it is very challenging to coordinate their activities in such a tool and to schedule it optimally. This work aims at finding such a schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is assumed to be process-bound. Resource-oriented Petri nets are extended to model the system. With the model, this work shows the conditions under which there is a one-wafer cyclic schedule such that the least cycle time can be obtained. An efficient algorithm is proposed then to test the existence of such a schedule and find it if existing. Example is given to illustrate the derived approaches.
Identifier
85000995898 (Scopus)
ISBN
[9781509024094]
Publication Title
IEEE International Conference on Automation Science and Engineering
External Full Text Location
https://doi.org/10.1109/COASE.2016.7743573
e-ISSN
21618089
ISSN
21618070
First Page
1400
Last Page
1404
Volume
2016-November
Grant
065/2013/A2
Fund Ref
National Natural Science Foundation of China
Recommended Citation
Yang, Fajun; Wu, Naiqi; Qiao, Yan; and Zhou, Mengchu, "Optimal scheduling analysis of treelike hybrid multi-cluster tools" (2016). Faculty Publications. 10160.
https://digitalcommons.njit.edu/fac_pubs/10160
