Document Type
Thesis
Date of Award
5-31-1990
Degree Name
Master of Science in Electrical Engineering - (M.S.)
Department
Electrical and Computer Engineering
First Advisor
William N. Carr
Second Advisor
Durgamadhab Misra
Third Advisor
N. M. Ravindra
Abstract
A multi-purpose cantilever beam and microbridge accelerometer structure has been designed and fabricated in this work. This same structure with modification can be employed as a capacitive accelerometer, mechanical resonance accelerometer, and a piezoresist accelerometer. Surface microengineering processing techniques have been developed in this work. The cavity structure significantly reduced the parasitic capacitance. This work reports the first instance of spin-on glass for rnicromechanical device applications as both a sacrifical layer and a planarization material for the cavity. Other results of this thesis including:
1. LPCVD low temperature oxide as the base material from which the cavity is etched;
2. Using LPCVD polysilicon beams as bottom electrodes;
3. Using low temperature, fine grain, stress free LPCVD polysilicon beams as top electrodes or sensing elements;
4. RTA annealing for polysilicon film stress relief.
Recommended Citation
Zhou, Zhixiong Joe, "Design and processing of micromechanical sensor devices" (1990). Theses. 3028.
https://digitalcommons.njit.edu/theses/3028
