Document Type
Thesis
Date of Award
10-31-1990
Degree Name
Master of Science in Electrical Engineering - (M.S.)
Department
Electrical and Computer Engineering
First Advisor
William N. Carr
Second Advisor
Eugene I. Gordon
Third Advisor
Ian Sanford Fischer
Abstract
Several microelectromechanical rotary motors have been designed and simulated with varying rotor and stator configurations. All of these micromotors operate with an electrostatic power source and have rotor diameters varying from 0.2 to 0.4 mm. These micromotors develop torques in the range 8 to 50 picoNewtons with rotors of polysilicon with 2 micron film thickness based on the detailed simulations of this thesis using a 3-phase voltage power source. The geometries modelled in this work are side-drive and vertical-drive configurations. These micromotors obtain drive torque from the fringe-field differential at the periphery of the rotor poles.
Unlevitated micromotors (with bearings) have been modeled with the number of rotor poles varying from 4 to 8 and stator poles varying from 12 to 120. Micromotors with a levitated (no bearings) rotor have been designed using rf levitation, and a pulsed 3-phase voltage for torque drive. A large torque is obtained for vertical drive motors compared with side drive motors.
Designs for the micromotors in this thesis are based on fabrication using critical intermask dimensional control in the range of submicron to 3 microns for different configurations. Polysilicon will be used for the rotor and stator microengineered designs. Bearings of silicon nitride against silicon nitride with phosphosilicate silicate glass as the sacrificial layer are used in the proposed design for unlevitated motors. The designs with levitated rotors do not utilize any bearings.
Recommended Citation
Yu, Hong, "Rotary micromotor design with IC-compatible processing" (1990). Theses. 3019.
https://digitalcommons.njit.edu/theses/3019
