Document Type
Thesis
Date of Award
5-31-1990
Degree Name
Master of Science in Electrical Engineering - (M.S.)
Department
Electrical and Computer Engineering
First Advisor
William N. Carr
Second Advisor
Edip Niver
Third Advisor
Durgamadhab Misra
Abstract
This master's thesis is about microengineered accelerometer integrated on a silicon wafer using two polysilicon layers acting as capacitors. This accelerometer operates as a capacitor sensor which is built between two polysilicon layers. It senses a difference of acceleration of gravity, or weight of the polysilicon beam. Both changes tend to change the capacitance between two layers, therefore, to change the resonant frequency of a resonant circuit built using this device and external inductors.
This master's thesis involves theoretical calculations of capacitor sensor for three sizes of capacitor area. Even though this sensor has not been fabricated yet, this sensor will operate as the smallest accelerometer with minimum input level of 10-5(cm/s2), or operates as the smallest massmeter with minimum input level of 10-6(μg).
Along with the above mentioned two applications: accelerometer and massmeter, this capacitor sensor in a resonant circuit will be used for mass levitation only by electrostatic force stored in the capacitors. In this thesis, mechanism of levitation, theoretical calculation, relation between electrostatic force stored in the capacitor and gravity force put on the beam, device geometry integrated on silicon wafer, and also prototype device using glass plates for demonstration experiment will be discussed.
Also, in this thesis, the possibility of using superconductivity as a component for constructing a resonant circuit will he discussed.
Recommended Citation
Shigematsu, Nana, "Design and analysis of microengineered accelerometer" (1990). Theses. 2921.
https://digitalcommons.njit.edu/theses/2921
