Document Type


Date of Award


Degree Name

Master of Science in Applied Physics - (M.S.)



First Advisor

Ken K. Chin

Second Advisor

John Charles Hensel

Third Advisor

Eugene I. Gordon


In this research work, non-contact temperature measurement was applied to determine the thermal conductivity of diamond-like and hard carbon thin films. Dielectric materials widely used as thin films in device manufacturing are SiO2, Si3N4, polymer, and etc. However, their heat dissipating capacity is not good for power devices. It is necessary to develop a new material for this purpose. Diamond crystal is a high quality dielectric material. It has the highest room-temperature thermal conductivity [k=20W (cm · K) at 20°C] among all materials. In addition, it has high electrical resistivity ( >1016 Ω · cm) and high strength [1]. So, diamond¬like film is the first candidate for this purpose. Two methods were reported to measure the thermal conductivity of diamond-like films [2, 3]: a DC technique [4] and an AC (or 3ω) technique [5,6]. In these methods, the temperature was measured by thermocouple or thermal resistor. The accuracy of the measurement will be affected by the leads of the sensors, since thermal energy will be transferred through the lead wires. This restricts the technique samples of thickness >5 μm. In practice, the thickness of diamond-like films used in power device applications is about 1 um or even less. In our experiment, contactless temperature measurement for thermal conductivity of diamond-like and hard carbon thin films was introduced to measure the samples with thickness of 2μm. The experimental results show that this method is useful to study thermal conductivity of diamond-like and hard carbon thin films. In the thesis, fundamentals of thermal detection are reviewed; the design, procedure, and validity of non-contact measurement method are presented; and experimental results are reported and discussed.

Included in

Other Physics Commons



To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.