Date of Award
Spring 1994
Document Type
Thesis
Degree Name
Master of Science in Materials Science and Engineering - (M.S.)
Department
Committee for the Interdisciplinary Program in Materials Science and Engineering
First Advisor
Ravindra, N. M.
Second Advisor
Russo, Onofrio L.
Third Advisor
Buteau, Leon Joseph
Abstract
Cubic silicon carbide films grown by chemical vapor deposition (CVD) on silicon substrates typically have n-type conductivity at 300 °K dominated by a heavily compensated donor with a binding energy in the < 20 meV range. Binding energies <20
Recommended Citation
Farhad-Garousi, Mark, "Processing, structural and electrical properties of SiC" (1994). Theses. 1617.
https://digitalcommons.njit.edu/theses/1617
