Date of Award
Master of Science in Applied Physics - (M.S.)
Kenneth Rudolph Farmer
John Francis Federici
William N. Carr
A miniature pressure sensor head is designed and fabricated using an ultra-thin silicon membrane directly bonded to an excimer laser micromachined substrate. The pressure sensor head has its intended implementation as part of an optically interrogated device with sensitivity to pressures ranging from 0.5 to 4.0 MPa. The pressure range design is shown to be easily adjusted by tailoring the thickness of the membrane wafer. The fabrication process features numerous advantages over existing pressure sensor construction technology including a maskless procedure and no chemical etching or mechanical thinning necessary to form the membrane after bonding. An optic lever is constructed and tested using a reflective aluminum surface. The response of the optic lever device was found to be 160 mV/µm in the linear region.
Statler, Chad Eugene, "Design and fabrication of a miniature pressure sensor head using direct bonded ultra-thin silicon wafers" (1996). Theses. 1125.