Date of Award
Master of Science in Materials Science and Engineering - (M.S.)
Committee for the Interdisciplinary Program in Materials Science and Engineering
Roland A. Levy
John Francis Federici
Lev N. Krasnoperov
This study was dedicated to the synthesis of the thin film materials required to fabricate the waveguide and the reference arm barrier for integrated optical sensor. Phosphosilicate glass (PSG) thin films were synthesized on silicon and quartz wafers by LPCVD using Ditertiarybutylsilane(DTBS), Trimethylphosphite(TMP) and oxygen as precursors. The films were processed at different temperatures between 600°C and 700°C at a constant pressure, and at different flow rate of TMP.
Wu, Hui, "Synthesis and characterization of phosphosilicate glass thin films by LPCVD sensor application" (1997). Theses. 1049.