Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid Multicluster Tools via Petri Nets

Document Type

Article

Publication Date

11-1-2017

Abstract

Scheduling a multicluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model the dynamic behavior of the tool. By this model, a schedule of the system is analytically expressed as a function of robots' waiting time. Based on this model, this paper presents the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require determining the robots' waiting time via simple calculation and thus are efficient. Examples are given to show the application and effectiveness of the proposed method.

Identifier

85035795866 (Scopus)

Publication Title

IEEE Transactions on Systems Man and Cybernetics Systems

External Full Text Location

https://doi.org/10.1109/TSMC.2016.2531697

e-ISSN

21682232

ISSN

21682216

First Page

2920

Last Page

2932

Issue

11

Volume

47

Grant

601273036

Fund Ref

National Natural Science Foundation of China

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