Petri net modeling and scheduling of a close-down process for time-constrained single-arm cluster tools

Document Type

Article

Publication Date

3-1-2018

Abstract

In wafer fabrication, a robotic cluster tool is required to be closed down in order for engineers to perform its on-demand and preventive maintenance and switch between different wafer lots. They often deal with a close-down process subject to wafer residency time constraints, i.e., a wafer must exit from a processing chamber before its quality degradation within a certain time limit. To obtain higher yield, it is very important to optimize a close-down process for a cluster tool. Yet the existing literature pays no or little attention to this issue. By focusing on a time-constrained single-arm cluster tool, this paper intends: 1) to build its Petri net model to analyze its schedulability and 2) to develop computationally efficient algorithms to find an optimal and feasible schedule for its closingdown process under different workloads at its steps. Industrial examples are used to illustrate the application of the proposed method.

Identifier

85050090441 (Scopus)

Publication Title

IEEE Transactions on Systems Man and Cybernetics Systems

External Full Text Location

https://doi.org/10.1109/TSMC.2016.2598303

e-ISSN

21682232

ISSN

21682216

First Page

389

Last Page

400

Issue

3

Volume

48

Grant

CMMI-1162482

Fund Ref

National Natural Science Foundation of China

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