Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

Document Type

Conference Proceeding

Publication Date

7-1-2015

Abstract

In semiconductor manufacturing, wafer residency time constraints make the scheduling problem of cluster tools complicated. A process module (PM) in cluster tools is prone to failure. It is crucial to deal with any such failure in a proper and timely manner. If there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs. However, due to wafer residency time constraints, it is highly challenging to control a tool such that it can be correctly transferred from a feasible schedule before failure to another after it. To solve this problem, a Petri net model is developed to describe the dynamic behavior of a single-arm cluster tool and failure response policies are proposed. The proposed policies are formulated via simple control laws for their easy implementation. Examples are given to show them.

Identifier

85027922358 (Scopus)

Publication Title

IEEE Transactions on Automation Science and Engineering

External Full Text Location

https://doi.org/10.1109/TASE.2014.2312823

ISSN

15455955

First Page

1125

Last Page

1139

Issue

3

Volume

12

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