Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools
Document Type
Conference Proceeding
Publication Date
10-7-2015
Abstract
It is very challenging to obtain a one-wafer cyclic schedule for the widely used multi-cluster tools in semiconductor manufacturing. This work studies the scheduling problem for a single-arm tree-like multi-cluster tool that is process-dominant. A resource-oriented Petri net (PN) model is developed to describe its operation behavior by explicitly modeling robot waiting. Based on it, sufficient and necessary conditions are for the first time established to find a one-wafer periodic schedule. By determining robot waiting time, efficient algorithms are proposed to find such a schedule with the minimal cycle time. An example is used to show its application.
Identifier
84952761314 (Scopus)
ISBN
[9781467381833]
Publication Title
IEEE International Conference on Automation Science and Engineering
External Full Text Location
https://doi.org/10.1109/CoASE.2015.7294094
e-ISSN
21618089
ISSN
21618070
First Page
292
Last Page
297
Volume
2015-October
Recommended Citation
Zhu, Qinghua; Qiao, Yan; and Zhou, Mengchu, "Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools" (2015). Faculty Publications. 6727.
https://digitalcommons.njit.edu/fac_pubs/6727
