Colored timed Petri nets for modeling and analysis of cluser tools

Document Type

Article

Publication Date

1-1-2010

Abstract

In this paper, a colored timed resource-oriented Petri net (CTROPN) is developed to model the cluster tools in semiconductor fabrication. It is structurally simple and concise, since each module in a cluster tool corresponds to a unique place in CTROPN. It is also powerful in modeling the qualitative and temporal behavior of the cluster tools with a single-blade or dual-blade robot. The initial transient behavior, steady-state behavior and the final transient behavior can all be investigated through a single model. © 2010 John Wiley and Sons Asia Pte Ltd and Chinese Automatic Control Society.

Identifier

77955321056 (Scopus)

Publication Title

Asian Journal of Control

External Full Text Location

https://doi.org/10.1002/asjc.183

ISSN

15618625

First Page

253

Last Page

266

Issue

3

Volume

12

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