Model Reference Zero Vibration control of ultrahigh precision piezoelectric nanopositioner

Document Type

Conference Proceeding

Publication Date

10-15-2010

Abstract

This paper presents a new control method for high precision positioning of a monolithic cruciform piezoelectric actuator system which contains circuital nonlinearities as well as uncertainties. The proposed Model Reference Zero Vibration (MRZV) control combines the advantages of model reference and input shaping, is introduced to control such ultrahigh positioning devices whose nonlinear characteristics can hardly be modeled precisely enough in the scale of nanometers. The transient response and performance of this cruciform piezoelectric actuator is improved without requiring the explicit knowledge of an accurate model of the parasitic nonlinearities. Experimental results confirm the effectiveness and practicality of high precision positioning actuator with proposed model reference control method. © 2010 AACC.

Identifier

77957785471 (Scopus)

ISBN

[9781424474264]

Publication Title

Proceedings of the 2010 American Control Conference ACC 2010

First Page

5856

Last Page

5861

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