An accurate ellipsometric reflectance ratio method

Document Type

Article

Publication Date

12-1-1985

Abstract

The absolute reflectance ratio, mod rho mod , given as the amplitude of the parallel to the normal reflectance, is determined unambiguously using two detectors. This is achieved even when the incident source intensity during the parallel reflectance measurement is different from that for the measurement of the normal reflectance. The reflected beam is divided into two parts and the parallel reflectance of one part is measured at the same time as the normal reflectance of the other. The measurements are repeated with each analyser rotated by 90 degrees , and the product of the two ratios formed by each set of measurements is used to yield mod rho mod which is independent of source variations.

Identifier

0022123480 (Scopus)

Publication Title

Journal of Physics D Applied Physics

External Full Text Location

https://doi.org/10.1088/0022-3727/18/9/003

ISSN

00223727

First Page

1723

Last Page

1730

Issue

9

Volume

18

This document is currently not available here.

Share

COinS