Microbeam X-Ray Standing Wave and High Resolution Diffraction

Document Type

Conference Proceeding

Publication Date

5-12-2004

Abstract

Post-focusing collimating optics are introduced as a tool to condition X-ray microbeams for the use in high-resolution X-ray diffraction and scattering techniques. As an example, a one-bounce imaging capillary and miniature Si(004) channel-cut crystal were used to produce a microbeam with 10 μm size and an ultimate angular resolution of 2.5 arc sec. This beam was used to measure the strain in semiconductor microstructures by using X-ray high resolution diffraction and standing wave techniques to Δd/d < 5×10-4.

Identifier

33947424560 (Scopus)

ISBN

[0735401799]

Publication Title

Aip Conference Proceedings

External Full Text Location

https://doi.org/10.1063/1.1757972

e-ISSN

15517616

ISSN

0094243X

First Page

1027

Last Page

1030

Volume

705

Grant

DMR 9713424

Fund Ref

National Science Foundation

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