Experimental study of micromachined electrostatic torsion actuators with full travel range

Document Type

Article

Publication Date

9-1-2004

Abstract

By studying pull-in behavior, we investigate the stability of single-crystal silicon, rectangular, electrostatic torsion actuators in a variety of ambients and configurations. These structures are designed for full travel range using partial-plate buried electrodes on either oxidized silicon or nitrided glass substrates. We find that the presence of charge in both systems, due at least in part to moisture on insulating surfaces surrounding the buried partial plate, has a large effect on pull-in performance, even in vacuum and flowing dry nitrogen. We are able to minimize this charge effect by using devices fabricated with ground shield electrodes. These improved structures exhibit stable actuation in air without pull-in at a travel range that exceeds 90%. This is among the highest measured stable values reported in the literature. © 2003 Elsevier B.V. All rights reserved.

Identifier

4344658383 (Scopus)

Publication Title

Sensors and Actuators A Physical

External Full Text Location

https://doi.org/10.1016/j.sna.2003.11.026

ISSN

09244247

First Page

466

Last Page

472

Issue

2-3

Volume

114

Fund Ref

National Science Foundation

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