Flexible membrane pressure sensor

Document Type

Article

Publication Date

4-13-2005

Abstract

A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 ± 0.020 mV/psi. The measurements observed are in good agreement with the analytical solution. © 2004 Published by Elsevier B.V.

Identifier

17044385029 (Scopus)

Publication Title

Sensors and Actuators A Physical

External Full Text Location

https://doi.org/10.1016/j.sna.2004.10.012

ISSN

09244247

First Page

332

Last Page

335

Issue

2

Volume

119

Fund Ref

State of New Jersey Commission on Science and Technology

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