Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation

Document Type

Article

Publication Date

5-11-2012

Abstract

It is very challenging to schedule cluster tools subject to wafer residency time constraints and activity time variation. This work develops a Petri net model to describe the system and proposes a two-level real-time scheduling architecture. At the lower level, a real-time control policy is used to offset the activity time variation as much as possible. At the upper level, a periodical off-line schedule is derived under the normal condition. This work presents the schedulability conditions and scheduling algorithms for an off-line schedule. The schedulability conditions can be analytically checked. If they are satisfied, an off-line schedule can be analytically found. The off-line schedule together with a real-time control policy forms the real-time schedule for the system. It is optimal in terms of cycle time minimization. Illustrative examples are given to show the application of the proposed approach. © 2004-2012 IEEE.

Identifier

84863456306 (Scopus)

Publication Title

IEEE Transactions on Automation Science and Engineering

External Full Text Location

https://doi.org/10.1109/TASE.2012.2192476

ISSN

15455955

First Page

564

Last Page

577

Issue

3

Volume

9

Grant

60974098

Fund Ref

National Natural Science Foundation of China

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