A novel scheduling approach to dual-arm cluster tools with wafer revisiting

Document Type

Conference Proceeding

Publication Date

12-1-2012

Abstract

It has been shown that, for dual-arm cluster tools with wafer revisiting, a swap strategy may not be optimal. To improve the performance of such a system, a Petri net model is developed in this work. Based on it, dynamical behavior of the wafer production process is analyzed. Then, two new scheduling methods called 2-wafer cyclic schedules are presented. Cycle time analysis shows that, under some conditions, the performance obtained by the 2-wafer cyclic schedules is better than that obtained by a swap strategy. Thus, the methods presented in this paper and the swap strategy can be used to complement each other in optimally scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are presented to show the results. © 2012 IEEE.

Identifier

84872396050 (Scopus)

ISBN

[9781467317146]

Publication Title

Conference Proceedings IEEE International Conference on Systems Man and Cybernetics

External Full Text Location

https://doi.org/10.1109/ICSMC.2012.6377897

ISSN

1062922X

First Page

1213

Last Page

1218

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