Vacuum microtriode characteristics

Document Type

Article

Publication Date

1-1-1990

Abstract

Pentode-like I-V characteristics are simulated for lateral vacuum microelectronic devices with wedge-shaped field emission cathodes. A single grid provides electrostatic isolation between the cathode and anode for a large equivalent anode series resistance. Device characteristics are presented for a structure with a field emission cathode, one control grid, an anode, and two trajectory deflection electrodes. The cathode-to-control grid separation for trajectory simulation is a nominal 1 μm and the emission tip radii are 0.01 and 0.05 μm. The device length including deflectors is 18 μm. Device characteristics are modelled over an anode potential range of 10–200 V. At 50 V anode potential, a transconductance of 4 μ S/mm and 0.1 S/mm is calculated based on 0.05 and 0.01 μm wedge radii, respectively. © 1990, American Vacuum Society. All rights reserved.

Identifier

5544300112 (Scopus)

Publication Title

Journal of Vacuum Science and Technology A Vacuum Surfaces and Films

External Full Text Location

https://doi.org/10.1116/1.576510

e-ISSN

15208559

ISSN

07342101

First Page

3581

Last Page

3585

Issue

4

Volume

8

This document is currently not available here.

Share

COinS