Surface modification with gas cluster ion beams

Document Type

Article

Publication Date

6-2-1993

Abstract

A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO2 are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing. © 1993.

Identifier

0000126123 (Scopus)

Publication Title

Nuclear Inst and Methods in Physics Research B

External Full Text Location

https://doi.org/10.1016/0168-583X(93)95330-8

ISSN

0168583X

First Page

223

Last Page

226

Issue

1-4

Volume

79

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