A micromachined flow shear-stress sensor based on thermal transfer principles

Document Type

Article

Publication Date

3-1-1999

Abstract

Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. The sensor consists of a suspended silicon-nitride diaphragm located on top of a vacuum-sealed cavity. A heating and heat-sensing element, made of polycrystalline silicon material, resides on top of the diaphragm. The underlying vacuum cavity greatly reduces conductive heat loss to the substrate and therefore increases the sensitivity of the sensor. Testing of the sensor has been conducted in a wind tunnel under three operation modes - constant current, constant voltage, and constant temperature. Under the constant-temperature mode, a typical shear-stress sensor exhibits a time constant of 72 μs. © 1999 IEEE.

Identifier

0033099130 (Scopus)

Publication Title

Journal of Microelectromechanical Systems

External Full Text Location

https://doi.org/10.1109/84.749408

ISSN

10577157

First Page

90

Last Page

98

Issue

1

Volume

8

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