Application of USM to micromachining by on-the-machine tool fabrication

Document Type

Conference Proceeding

Publication Date

1-1-2000

Abstract

Most machining methods have difficulties in machining hard, brittle materials such as glass, ceramics, and silicon. Ultrasonic machining(USM) is a unique method from this point of view, because it easily machines these materials. However, USM has limitation in its application to micromachining because there are problems in fixing microtools to the machine and maintaining high precision. In this paper we propose a technique of micro-USM by applying on-the-machine tool fabrication by wire electrodischarge grinding (WEDG). As a result, we were able to make microholes as small as 20μm in diameter on a silicon plate. Additional experiments revealed the possibility of wide application.

Identifier

33645035272 (Scopus)

ISBN

[0780364864, 9780780364868]

Publication Title

Proceedings Korus 2000 4th Korea Russia International Symposium on Science and Technology

External Full Text Location

https://doi.org/10.1109/KORUS.2000.866068

First Page

106

Last Page

115

Volume

3

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