An angle-based design approach for rectangular electrostatic torsion actuators

Document Type

Article

Publication Date

12-1-2001

Abstract

In this paper, we develop a fast, angle-based design approach for rectangular electrostatic torsion actuators based on several simple equations. This approach is significantly more straightforward than the usual full calculation or simulation methods. The main results of the simplified approach are verified by comparing them with analytical calculations and MEMCAD simulations with fractional difference smaller than 3% for torsion mode dominant actuators. Also, good agreement is found by comparison with the measured behavior of a microfabricated fullplate device.

Identifier

0035586839 (Scopus)

Publication Title

Journal of Microelectromechanical Systems

External Full Text Location

https://doi.org/10.1109/84.967379

ISSN

10577157

First Page

561

Last Page

568

Issue

4

Volume

10

Grant

DMR-9871272

Fund Ref

National Science Foundation

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