Design and fabrication of electrostatically actuated synthetic microjets
Document Type
Conference Proceeding
Publication Date
1-1-2003
Abstract
The purpose of this paper is to design and fabricate efficient electrostatically actuated synthetic microjets. For this, special attention is given to the coupling between the electrostatic actuation, the solid deformation of the membrane, and the generated fluid flow. In particular, the motion of the membrane, which is critical in generating the jet flow, is studied using the energy method applied to the large displacement of plates, which, in turn, leads to a relation between the required voltage and the membrane deformation. The flow is then deduced. Finally, we present an efficient method to microfabricate such devices.
Identifier
1842584559 (Scopus)
Publication Title
American Society of Mechanical Engineers Fluids Engineering Division Publication FED
External Full Text Location
https://doi.org/10.1115/IMECE2003-41579
ISSN
08888116
First Page
517
Last Page
524
Volume
259
Recommended Citation
Roman, Max and Aubry, Nadine, "Design and fabrication of electrostatically actuated synthetic microjets" (2003). Faculty Publications. 14258.
https://digitalcommons.njit.edu/fac_pubs/14258
