Virtual production lines design for back-end semiconductor manufacturing systems

Document Type

Article

Publication Date

8-1-2003

Abstract

This paper introduces the virtual production line (VPL) concept, which initiates a new method to model the shop floor from both control and management point of view. Heuristic algorithms are presented to dynamically configure a large system into many VPLs, which ensure the line balance and efficiency, and accurately predicate the completion time for each work-order. The proposed methodology and algorithms are demonstrated through a simplified back-end semiconductor manufacturing system.

Identifier

0042386739 (Scopus)

Publication Title

IEEE Transactions on Semiconductor Manufacturing

External Full Text Location

https://doi.org/10.1109/TSM.2003.815205

ISSN

08946507

First Page

543

Last Page

550

Issue

3

Volume

16

Fund Ref

National Natural Science Foundation of China

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