Thermal phase change and activation energy of crystallization of Ge-Sb-Te-Sn thin films

Document Type

Article

Publication Date

12-1-2003

Abstract

To improve the optical storage performance, Sn was doped into Ge2Sb2Te55 phase change thin films. The optical and thermal properties of Sn-doped Ge2Sb2Te55 film were investigated. The crystal structures of the as-sputtered and the annealed films were identified by the X-ray diffraction (XRD) method. The differential scanning calorimeter (DSC) method is used to get the crystallization temperature and crystallization energy (Ea). It was found that proper Sn-doping could highly improve storage performance of the Ge2Sb2Te55 media.

Identifier

1942445310 (Scopus)

Publication Title

Chinese Optics Letters

ISSN

16717694

First Page

716

Last Page

718

Issue

12

Volume

1

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