Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets

Document Type

Article

Publication Date

7-1-2007

Abstract

This paper addresses the problem of real-time deadlock-free scheduling for a semiconductor track system. The system is required to process wafers continuously, cassette by cassette. The process is not necessarily a repeated one. In addition, the system is deadlock-prone and its modules are failure-prone. Thus, real-time scheduling approaches are required to achieve high-performance. The problem can be solved in a hierarchical way. A deadlock avoidance policy is developed for the system as a lower-layer controller. With the support of the deadlock avoidance policy, heuristic rules are proposed to schedule the system in real-time. An effective modeling tool, colored-timed resource-oriented Petri net, is presented. It is shown that with this model we can schedule a system to achieve satisfactory results in real-time. This method is tolerant to module failures. © Springer-Verlag 2007.

Identifier

34249664951 (Scopus)

Publication Title

Or Spectrum

External Full Text Location

https://doi.org/10.1007/s00291-006-0046-3

e-ISSN

14366304

ISSN

01716468

First Page

421

Last Page

443

Issue

3

Volume

29

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