Synthesis of carbon nanotubes: Controlled fabrication of intraconnects

Document Type

Article

Publication Date

8-7-2007

Abstract

The authors have successfully fabricated carbon nanotubes bridges (intraconnects) between predetermined layouts of metal tip electrodes, taking advantage of the tips as leading catalytic points. Overall, the authors have demonstrated a yield of 15%-30% depending on the process parameters and electrode layout. They used two deposition methods: chemical vapor deposition (CVD) and plasma enhanced CVD (PECVD). Bridges could be fabricated with only CVD. The authors used carbon monoxide (CO) for the CVD process; the PECVD, however, required a mixture of CO and H2. Ethanol was successfully used with both deposition methods. © 2007 American Vacuum Society.

Identifier

34547599719 (Scopus)

Publication Title

Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures

External Full Text Location

https://doi.org/10.1116/1.2746332

ISSN

10711023

First Page

1191

Last Page

1196

Issue

4

Volume

25

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