A petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems

Document Type

Article

Publication Date

10-1-2007

Abstract

In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach. © 2007 IEEE.

Identifier

35348862663 (Scopus)

Publication Title

IEEE Transactions on Automation Science and Engineering

External Full Text Location

https://doi.org/10.1109/TASE.2007.905995

ISSN

15455955

First Page

584

Last Page

588

Issue

4

Volume

4

Grant

Ex-91-E-FA06-4-4

Fund Ref

Ministry of Education

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