Fabry-Perot diaphragm fiber-optic sensor

Document Type

Article

Publication Date

11-1-2007

Abstract

The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio. © 2007 Optical Society of America.

Identifier

38749128033 (Scopus)

Publication Title

Applied Optics

External Full Text Location

https://doi.org/10.1364/AO.46.007614

e-ISSN

15394522

ISSN

1559128X

First Page

7614

Last Page

7619

Issue

31

Volume

46

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