Microfabricated implantable flow sensor for medical applications
Document Type
Conference Proceeding
Publication Date
3-31-2008
Abstract
ARF wireless capacitive flow sensor is developed. The sensor has integrated inductor with the flow sensitive capacitors as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied flow. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139 MPa. The sensor has size of 10 mm × 4 mm × 0.5 um. The sensor integrated two pressure sensors together and designed related to flow 5-20ml/hour. The deflection of different shape of membranes and the parameters of flow sensor sensitivity are discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.
Identifier
41149105295 (Scopus)
ISBN
[9780819470614]
Publication Title
Proceedings of SPIE the International Society for Optical Engineering
External Full Text Location
https://doi.org/10.1117/12.763795
ISSN
0277786X
Volume
6886
Recommended Citation
Sheng, Liu; Farrow, Reginald; Zunino, James L.; Lim, Hee C.; Federici, John; and Thomas, Gordon, "Microfabricated implantable flow sensor for medical applications" (2008). Faculty Publications. 12846.
https://digitalcommons.njit.edu/fac_pubs/12846
