Modeling and design of an embossed diaphragm fabry-perot pressure Sensor

Authors

Ivan Padron, New Jersey Institute of Technology
Anthony T. Fiory, New Jersey Institute of Technology
N. M. Ravindra, New Jersey Institute of Technology

Document Type

Conference Proceeding

Publication Date

12-1-2008

Abstract

A new embossed diaphragm based Fabry-Perot cavity is introduced in the fabrication of a pressure sensor. An analytical approach is deployed to study the embossed diaphragm and Fabryperot cavity behavior as well the sensor's performance. The advantages of the embossed diaphragm based Fabry-Perot cavity are observed in relation to the flat diaphragm based FabryPerot cavity. © 2008 MS&T'08 ®.

Identifier

63749089998 (Scopus)

ISBN

[9781605606217]

Publication Title

Materials Science and Technology Conference and Exhibition MS and T 08

First Page

992

Last Page

997

Volume

2

Recommended Citation

Padron, Ivan; Fiory, Anthony T.; and Ravindra, N. M., "Modeling and design of an embossed diaphragm fabry-perot pressure Sensor" (2008). Faculty Publications. 12410.
https://digitalcommons.njit.edu/fac_pubs/12410